发明名称 |
Method for manufacturing a semiconductor device |
摘要 |
The invention provides a method for manufacturing a semiconductor device for preventing the low bonding strength reliability in flip tip mounting of a semiconductor chip on an organic substrate. In the thermal hardening process for hardening the under fill resin filled between a semiconductor chip and organic substrate. The thermal expansion due to rapid heating of an organic substrate is mitigated by applying multi-step heating process in which under fill resin is heated at a temperature T1 lower than the hardening temperature T2 of the under fill resin for a predetermined time.
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申请公布号 |
US2002072149(A1) |
申请公布日期 |
2002.06.13 |
申请号 |
US20010966942 |
申请日期 |
2001.09.28 |
申请人 |
YOSHIDA KOJI |
发明人 |
YOSHIDA KOJI |
分类号 |
H01L21/60;H01L21/56;(IPC1-7):H01L21/44;H01L21/48;H01L21/50 |
主分类号 |
H01L21/60 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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