发明名称 Method for diagnosing process parameter variations from measurements in analog circuits
摘要 A method for diagnosing process parameter variations from measurements in analog circuits. The diagnosability conditions for the accurate computation of device parameters are extended in the presence of measurement noise. In case this diagnosability condition is not met by standard test signals, a method is provided for automatically generating optimized tests that enable the computation of device parameters. The test generator explicitly optimizes the ability to compute device parameters from the test response. A cause-effect analysis engine is provided to diagnose the cause of variation in IC performance metrics in terms of the variation in device parameter values. Once the cause of parametric yield loss is diagnosed in terms of device parameters variations, the information can be used by process engineers to tune the manufacturing process to improve yield.
申请公布号 US2002072872(A1) 申请公布日期 2002.06.13
申请号 US20010838404 申请日期 2001.04.19
申请人 CHATTERJEE ABHIJIT;CHERUBAL SASIKUMAR 发明人 CHATTERJEE ABHIJIT;CHERUBAL SASIKUMAR
分类号 G06F17/50;H01L21/66;(IPC1-7):G06F17/50;G01R27/28 主分类号 G06F17/50
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