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经营范围
发明名称
PROTECTIVE GAS SHIELD APPARATUS
摘要
申请公布号
EP1212475(A1)
申请公布日期
2002.06.12
申请号
EP20000936074
申请日期
2000.05.19
申请人
SILICON VALLEY GROUP THERMAL SYSTEMS LLC
发明人
STODDARD, D., NEIL;YUH, SOON, K.
分类号
B01J19/00;C23C16/44;C23C16/455;H01L21/205;(IPC1-7):C23C16/00
主分类号
B01J19/00
代理机构
代理人
主权项
地址
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