发明名称 MINIATURE SILICON CONDENSER MICROPHONE AND METHOD FOR PRODUCING SAME
摘要 <p>A silicon condenser microphone package is disclosed. The silicon condenser microphone package comprises a transducer unit, a substrate, and a cover. The substrate includes an upper surface having a recess formed therein. The transducer unit is attached to the upper surface of the substrate and overlaps at least a portion of the recess wherein a back volume of the transducer unit is formed between the transducer unit and the substrate. The cover is placed over the transducer unit and includes an aperture.</p>
申请公布号 WO2002045463(A2) 申请公布日期 2002.06.06
申请号 US2001049462 申请日期 2001.10.22
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