发明名称 |
Igniting plasma involves applying electric voltage between cathode and anode in magnetic field that is moved through gas chamber until plasma is ignited |
摘要 |
The method involves applying an electric voltage between a cathode (1) and an anode (2) in a magnetic field (3) that is moved through the gas chamber (4) until the plasma is ignited. The magnetic field is varied or moved by electromagnets (5,6) and is moved reciprocally between the boundaries of the gas chamber. Independent claims are also included for the following: a use of the method in a cathode atomizing system.
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申请公布号 |
DE10058768(A1) |
申请公布日期 |
2002.06.06 |
申请号 |
DE20001058768 |
申请日期 |
2000.11.27 |
申请人 |
SINGULUS TECHNOLOGIES AG |
发明人 |
EBINGER, HANS;KAPELLER, MAX;BECKER, WOLFGANG |
分类号 |
H01J37/34;(IPC1-7):H05H1/46 |
主分类号 |
H01J37/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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