发明名称 Igniting plasma involves applying electric voltage between cathode and anode in magnetic field that is moved through gas chamber until plasma is ignited
摘要 The method involves applying an electric voltage between a cathode (1) and an anode (2) in a magnetic field (3) that is moved through the gas chamber (4) until the plasma is ignited. The magnetic field is varied or moved by electromagnets (5,6) and is moved reciprocally between the boundaries of the gas chamber. Independent claims are also included for the following: a use of the method in a cathode atomizing system.
申请公布号 DE10058768(A1) 申请公布日期 2002.06.06
申请号 DE20001058768 申请日期 2000.11.27
申请人 SINGULUS TECHNOLOGIES AG 发明人 EBINGER, HANS;KAPELLER, MAX;BECKER, WOLFGANG
分类号 H01J37/34;(IPC1-7):H05H1/46 主分类号 H01J37/34
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