| 摘要 |
<p>A microelectromechanical (MEMS) device has a substrate (102), and at least one, generally planar moving element (106), such as an absorber or a mirror, disposed in parallel to the surface of the substrate. An actuator is operatively engageable with the moving element for selectively actuating the moving element between a series of successive, closely spaced positions in a plane horizontal to the surface of the substrate. The MEMS device may be effectively used as a variable attenuator and beam splitter. Various different actuators can be used. Preferably, the device is fabricated using a surface micromachining process. <IMAGE></p> |
