发明名称 METHOD FOR MANUFACTURING GLASS CERAMIC SUBSTRATE
摘要 PROBLEM TO BE SOLVED: To provide a method for manufacturing a glass ceramic substrate having a very high dimensional accuracy and a good surface condition by surely constraining a sintering contraction of a glass ceramic green sheet. SOLUTION: This method comprises (i) forming a laminated body by lamination of multiple glass ceramic green sheets on the surface of which a conductive pattern is formed, (ii) intercalating adhesive agent layers containing glass and a solvent on both surfaces of the laminated body and laminating constrained green sheets which contain hardly sinterable inorganic materials and an organic binder, (iii) eliminating organic constituents from the laminated body and then sintering and forming a glass ceramic substrate holding the constrained sheets and (iv) eliminating the constrained sheets from the substrate by projecting a mixture of a fluid, abrasive particles and an air to them, (v) while the glass content of the adhesive agent layer is equal to the amount used to combine the green sheets and the glass ceramic green sheets at the time of sintering and eliminated from the substrate together with the constrained sheets after sintering.
申请公布号 JP2002160979(A) 申请公布日期 2002.06.04
申请号 JP20000358325 申请日期 2000.11.24
申请人 KYOCERA CORP 发明人 MIYAUCHI MASAHIKO;SATA AKIHITO
分类号 B32B18/00;C04B35/622;C04B35/64;C04B41/91;H01L23/12;H01L23/15;H05K3/46 主分类号 B32B18/00
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