发明名称 |
SYNTHETIC QUARTZ GLASS FOR LIGHT TRANSMISSION |
摘要 |
PROBLEM TO BE SOLVED: To provide a synthetic quartz glass for light transmission which has low decreasing rate of transmissiveness by laser radiation having high energy density. SOLUTION: The synthetic quartz glass for light transmission has unpaired electron concentration of <=1×1014 pieces/cm3 by measurement of ESR spectrum corresponding to g=2.001±0.002 at room temperature and g=2.001±0.002 and g=2.008±0.002 at a low temperature of <100 K, respectively. In this case, an absolute value of difference in temperature between a surface imaginary temperature and a bulk imaginary temperature is <=50 deg.C. |
申请公布号 |
JP2002160936(A) |
申请公布日期 |
2002.06.04 |
申请号 |
JP20000352818 |
申请日期 |
2000.11.20 |
申请人 |
SUMITOMO METAL IND LTD |
发明人 |
NISHIHARA KATSUHIRO;YAMAMOTO TOSHIRO |
分类号 |
G03F7/20;C03B20/00;C03C3/06;G02B1/00;H01L21/027;(IPC1-7):C03C3/06 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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