发明名称 SYNTHETIC QUARTZ GLASS FOR LIGHT TRANSMISSION
摘要 PROBLEM TO BE SOLVED: To provide a synthetic quartz glass for light transmission which has low decreasing rate of transmissiveness by laser radiation having high energy density. SOLUTION: The synthetic quartz glass for light transmission has unpaired electron concentration of <=1×1014 pieces/cm3 by measurement of ESR spectrum corresponding to g=2.001±0.002 at room temperature and g=2.001±0.002 and g=2.008±0.002 at a low temperature of <100 K, respectively. In this case, an absolute value of difference in temperature between a surface imaginary temperature and a bulk imaginary temperature is <=50 deg.C.
申请公布号 JP2002160936(A) 申请公布日期 2002.06.04
申请号 JP20000352818 申请日期 2000.11.20
申请人 SUMITOMO METAL IND LTD 发明人 NISHIHARA KATSUHIRO;YAMAMOTO TOSHIRO
分类号 G03F7/20;C03B20/00;C03C3/06;G02B1/00;H01L21/027;(IPC1-7):C03C3/06 主分类号 G03F7/20
代理机构 代理人
主权项
地址