发明名称 Semiconductor device and method of making the same
摘要 A semiconductor device comprises a semiconductor substrate, a p-type well formed in the semiconductor substrate, an n-type well formed in the semiconductor substrate and positioned contiguous to the p-type well, an n-type diffused region formed in the p-type well, and a p-type diffused region formed in the n-type well, wherein a corner C1 having the p-type well on the inside is present in a part of the boundary pattern between the p-type well and the n-type well. At least one of the two sides defining the corner C1 extends from a top of the corner to the n-well by a predetermined width d over a predetermined length. The particular structure permits suppressing generation of a difference in a well isolation punch-through voltage between the corner and the straight portion of the well boundary of the semiconductor device, making it possible to provide a fine device structure while ensuring a desired well isolation punch-through voltage without relaxing a design rule.
申请公布号 US6399992(B1) 申请公布日期 2002.06.04
申请号 US20010819619 申请日期 2001.03.29
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 MATSUMOTO MASAHIKO;IGARASHI HIROFUMI
分类号 H01L21/76;H01L21/762;H01L21/8238;H01L27/092;(IPC1-7):H01L31/119 主分类号 H01L21/76
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