Semiconductor wafer review system and method

摘要

A semiconductor wafer review system and method. A method and system for front and back side review of semiconductor wafers is provided in various embodiments. Inspection data for the front side is used to position the wafer for front side review, and a wafer inverter is provided to flip the wafer for back side review. Inspection data for the back side is used to position the wafer for back side review.