发明名称 TWIST-N-LOCK WAFER AREA PRESSURE RING AND ASSEMBLY
摘要 PURPOSE: A Twist-N-Lock WAP ring assembly is provided to simplify the existing WAP ring assembly by improving the method of suspending the WAP ring assembly from the cam plungers of the Dual Frequency Coupled upper chamber assembly. CONSTITUTION: Three Twist-N-Lock bores(205) are machined every 120 degrees. The Twist-N-Lock bore(205) is essentially composed of two circular bores(610,615) machined next to one another(the reception bore(610) and the lock bore(615)) and set 5 degrees apart(620) on the same radial line(625). The stepped hanger bore(630) allows independent attachment of the stepped hanger.
申请公布号 KR20020041362(A) 申请公布日期 2002.06.01
申请号 KR20020017780 申请日期 2002.04.01
申请人 LAM RESEARCH CORPORATION 发明人 ANTOLIK JERREL K.
分类号 H01L21/3065;H01L21/687;(IPC1-7):H01L21/306 主分类号 H01L21/3065
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