发明名称 |
Magnetic multi-layer film manufacturing apparatus |
摘要 |
A magnetic multi-layer film manufacturing apparatus has a transferring chamber, a plurality of film-depositing chambers, and a robotic transferring device. Each film-depositing chamber has a rotatable substrate holder, a plurality of targets positioned at an incline on an opposing interior surface from the substrate holder, and a double layer rotating shutter mechanism and is controllable to deposit at least one layer of a magnetic multi-layer film structure. Magnetic multi-layer film structures are formed by depositing a plurality of magnetic films divided into a plurality of groups, each one of the plurality of groups deposited in an associated one of the plurality of film-depositing chambers continuously in a laminated state. A first division between successive groups of magnetic films is between a metal oxide film and a magnetic layer continuous therewith and a second division is between an antiferromagnetic layer and a magnetic layer continuous therewith.
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申请公布号 |
US2002064595(A1) |
申请公布日期 |
2002.05.30 |
申请号 |
US20010996772 |
申请日期 |
2001.11.30 |
申请人 |
NOMURA SHUJI;MIYOSHI AYUMU;TSUNEKAWA KOJI |
发明人 |
NOMURA SHUJI;MIYOSHI AYUMU;TSUNEKAWA KOJI |
分类号 |
C23C14/06;C23C14/34;C23C14/56;G11B5/39;H01F41/18;H01F41/30;H01L21/8246;H01L27/105;H01L43/08;H01L43/12;(IPC1-7):C23C14/32;C23C14/00 |
主分类号 |
C23C14/06 |
代理机构 |
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