| 摘要 |
<p>A strain-isolated mirror (20) is made from a ZERODUR (TM) substrate having body portions (34, 38). Connecting portions extend across a gap between the body portions with flexural hinges (48, 50, 52). In the fabrication of an integrated circuit for steps during which a wafer rests on a movable stage (10) with strain isolated mirrors (20, 21) of interferometers (18, 19) under a projector.</p> |
