PULSED PLASMA PROCESSING METHOD AND APPARATUS,申请号KR1020027002007-传众专利搜索

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发明名称	PULSED PLASMA PROCESSING METHOD AND APPARATUS
摘要
申请公布号	KR20020040775(A)	申请公布日期	2002.05.30
申请号	KR1020027002007	申请日期	2002.02.15
申请人		发明人
分类号	C23C16/44	主分类号	C23C16/44
代理机构		代理人
主权项
地址

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