| 摘要 |
PURPOSE: An inspecting device for display devices having a consecutive pattern is provided to compare an image of a Fourier transformed sample with a reference image, while automatically transferring the sample in an inspecting process of a display device having a repetitive pattern. CONSTITUTION: In a light source unit(110), a laser unit(112) generates laser beam, a transforming lens(115) progresses the laser beam in parallel, and a diffraction grating(116) is arranged. A transfer unit(140) moves a measurement sample(120) which the laser beam incident in parallel passes in front-rear and right-left sides, and generates information on a current position. In a camera unit(130), a Fourier transforming lens(132) performs diffraction for the laser beam to provide a Fourier transformed image, and a CCD(Charge Coupled Device) camera(134) photographs the Fourier transformed diffraction image. An image comparison unit(150) synchronizes the diffraction image to the transferred position information of the transfer unit(140), to compare the image of the sample which the laser beam currently passes with a normal reference image, to output an absolute value. A defect position calculation unit(160) analyzes the absolute value output in the image comparison unit(150), to calculate a position having a defect. And a measurement and analysis unit(170) connected to an output side of the defect position calculation unit(160) operates the defect position and a defect type through a high resolution camera and processing program.
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