发明名称 |
Method of manufacturing a surface acoustic wave element |
摘要 |
A method of manufacturing a surface acoustic wave element includes the steps of providing a piezoelectric body having an interdigital transducer, where the interdigital transducer is made of a metal having a higher density than the piezoelectric body, and performing ion bombardment of the interdigital transducer and the piezoelectric body simultaneously so as to reduce the thickness of the interdigital transducer and the piezoelectric body.
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申请公布号 |
US2002062542(A1) |
申请公布日期 |
2002.05.30 |
申请号 |
US20020054907 |
申请日期 |
2002.01.25 |
申请人 |
MURATA MANUFACTURING CO., LTD. |
发明人 |
TAKATA EIICHI;YAMAMOTO YASUJI;YONEDA TOSHIMARO;KADOTA MICHIO |
分类号 |
H03H3/08;H03H3/10;(IPC1-7):H04R17/00;H05K3/10 |
主分类号 |
H03H3/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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