| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for forming a protective film having high wear resistance by reducing stress generated on a film surface in the step of forming the protection film of a magnetic recording medium. SOLUTION: The protective film having high hardness, and high wear resistance and suppressed in increase of internal stress, is formed by providing the composition of the protective film with the cyclic characteristic of two cycles or more in the film thickness direction, and including the two layers of hard and soft films in each cycle. Thus, a highly reliable magnetic disk device is manufactured.
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