发明名称 PACKAGE STRUCTURE FOR CRYSTAL VIBRATOR AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a package for a thin crystal vibrator. SOLUTION: This invention provides a manufacturing method for a package of a crystal vibrator that is characterized by that anisotropic etching is applied to a silicon substrate to form a recessed part to the surface of the substrate, a crystal chip is mounted on a circuit substrate with a circuit pattern formed thereto, and the recessed part of the substrate is covered and sealed.
申请公布号 JP2002151994(A) 申请公布日期 2002.05.24
申请号 JP20000342981 申请日期 2000.11.10
申请人 CITIZEN WATCH CO LTD 发明人 WATANABE MAKOTO
分类号 H01L21/306;H01L23/04;H01L23/06;H03H3/02;H03H9/02;H03H9/10;H03H9/19;(IPC1-7):H03H9/02 主分类号 H01L21/306
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