发明名称 |
PRODUCTION CONTROL SYSTEM, AND HOST COMPUTER AND RECORDING MEDIUM USED FOR THE SAME |
摘要 |
<p>PROBLEM TO BE SOLVED: To provide a production control system for a sputtering target which enables a target user to efficiently operate a sputtering device and also enables a target maker to greatly shorten the period of delivery of the sputtering target and a medium where a program for the production control system is recorded. SOLUTION: The production control system for the sputtering target which uses a computer network is structured between the target maker and target user and various information regarding production control such as history information on a backing plate, production information on the sputtering target, and use information on the sputtering target is shared.</p> |
申请公布号 |
JP2002149759(A) |
申请公布日期 |
2002.05.24 |
申请号 |
JP20000349139 |
申请日期 |
2000.11.16 |
申请人 |
NIKKO MATERIALS CO LTD |
发明人 |
NAKAJIMA KOICHI;YAJIMA NORIYUKI;WATAYA KENICHI |
分类号 |
G05B19/418;C23C14/34;G06Q50/00;G06Q50/04;(IPC1-7):G06F17/60 |
主分类号 |
G05B19/418 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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