发明名称 PRODUCTION CONTROL SYSTEM, AND HOST COMPUTER AND RECORDING MEDIUM USED FOR THE SAME
摘要 <p>PROBLEM TO BE SOLVED: To provide a production control system for a sputtering target which enables a target user to efficiently operate a sputtering device and also enables a target maker to greatly shorten the period of delivery of the sputtering target and a medium where a program for the production control system is recorded. SOLUTION: The production control system for the sputtering target which uses a computer network is structured between the target maker and target user and various information regarding production control such as history information on a backing plate, production information on the sputtering target, and use information on the sputtering target is shared.</p>
申请公布号 JP2002149759(A) 申请公布日期 2002.05.24
申请号 JP20000349139 申请日期 2000.11.16
申请人 NIKKO MATERIALS CO LTD 发明人 NAKAJIMA KOICHI;YAJIMA NORIYUKI;WATAYA KENICHI
分类号 G05B19/418;C23C14/34;G06Q50/00;G06Q50/04;(IPC1-7):G06F17/60 主分类号 G05B19/418
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