Rotary piezoelectric microactuator with an optimum suspension arrangement

摘要

The invention relates to a microactuator comprising a movable structure having a symmetric axis about which the movable structure are divided into two parts which can produce the same movement but in opposite directions; two active arms built with piezoelectric material; two stationary structures to connect the two active arms at their two ends, respectively. The invention also relates to a disk drive suspension which is incorporated with the microactuator.