SEMICONDUCTOR DEVICE TESTING METHOD, USING A SPRING-BIASED TRANSFORMABLE CONDUCTIVE MEMBER ELECTRODE CONNECTION

摘要

An electrical connecting device and related method of testing a semiconductor device which provides testing of a semiconductor device under excellent and stable current transfer characteristics. Moreover, the electrical connecting device is easily produced under mass production conditions and can be made with a structure for testing of a semiconductor device where there are many pins arranged in a fine pitch on the semiconductor device. The electrical connector device includes a contactor which has a coil-shaped spring and a transformable conductive member extending in the compressing direction of the coil-shaped spiring. When one end of the conductive member is in contact with a first electrode and the other end of the conductive members in contact with the second electrode, the contactor electrically connects between the first electrode and the second electrode via the conductive member and generates contact pressure against the electrodes when the coil-shaped spring is pressed. A guide plate is provided in the electrical connector device having a through hole for inserting and positioning the contactor therein. In a preferred embodiment, the semiconductor device to be tested has the first electrode for contact against one end of the conductive member of the contactor. The second electrode is a land pattern in a substrate of the electrical connecting device contacting the other end of the transformable conductive member, with the land pattern in turn being connected to testing equipment for testing of the semiconductor device.