Durchflussregler für Gase mit leicht unterschiedlichen Molaren Massen

摘要

The system comprises a circuit where alternative carrier gases, such as hydrogen and nitrogen, are fed to a mass spectrometer (3) includes flow control systems (14A,14B) designed to ensure that similar flows of the gases reach the spectrometer. Each system comprises two differently calibrated restrictions (27,41) and valves (29) able to maintain flow through the restriction (27) alone or through both restrictions (27) and (41) in parallel as required.