| 摘要 |
PURPOSE: Equipment for fabricating a semiconductor device is provided to increase position precision of a wafer, by additionally correcting the position of the wafer when the wafer gets out of a predetermined position while using a position measuring unit. CONSTITUTION: A wafer(13) is placed on a plate(16). Plate upper and lower covers(11,11a) are installed at both sides of the plate. The position measuring unit(12) measures the position of the wafer, installed in the upper, lower, right and left sides of the inside of the plate upper cover and in the upper, lower, right and left sides of the upper part of the plate. A plurality of transfer pins(14) use the position value measured by the position measuring unit, and re-correct the position of the wafer while moving in the upper/lower direction and the right/left direction. A transfer pin holder and a transfer pin driving unit(17) support the plurality of transfer pins.
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