Method of manufacturing multilayered ceramic substrate and green ceramic laminate

摘要

The present invention provides a multilayered ceramic substrate having high precision and high reliability in which firing shrinkage in the planar direction thereof is suppressed and densification is achieved. The multilayered ceramic substrate is manufactured by laminating base layers each composed of a non-glass type low-temperature sintering ceramic raw material powder as a main component, and shrinkage inhibiting layers each composed of a sintering-resistant powder of alumina or the like as a main component to form a green ceramic laminate, and then firing the green ceramic laminate at the sintering temperature of the low-temperature sintering ceramic raw material powder. The shrinkage inhibiting layers contain a powder which does not soften and flow at the firing shrinkage start temperature of the low-temperature sintering ceramic powder, but permeates into the spaces of the sintering-resistant powder due to softening and flowing to densify the shrinkage inhibiting layers before sintering is completed.