| 摘要 |
<p>The sensing device (50') comprises a microelectromechanical structure (1) made of semiconductor material, and a control loop (53') for controlling the microelectromechanical structure (1). The microelectromechanical structure (1) comprises a stator element (2) and a rotor element (4) electrostatically coupled together, and the control loop (53') comprises a position interface (56) supplying a position signal (VOUT) indicative of the position of the rotor element (4), and a one-bit quantizer (66) receiving the position signal (VOUT) and supplying a corresponding bit sequence (OUT). The sensing device (50') further comprises a calibration device (24, 84, 86) for calibrating the microelectromechanical structure (1), and including a microactuator (24) made of semiconductor material and coupled to the rotor element (4), and a driving circuit (84, 86) for driving the microactuator (24), and receiving the bit sequence (OUT) and supplying to the microactuator (24) a driving signal (VCAL) correlated to a mean value (MBS) of the bit sequence (OUT) in a given time window. <IMAGE></p> |
