SYSTEM FOR FABRICATING SEMICONDUCTOR DEVICE AND OPERATING METHOD THEREOF

摘要

PURPOSE: A system for fabricating a semiconductor device is provided to shorten an interval of time from a process to a measurement test by testing whether the process is normal in unloading a wafer from process equipment, and to reduce defects by previously stopping driving the process equipment. CONSTITUTION: A wafer transfer unit(36b) selectively loads or unloads the wafer between a cassette and a process chamber(32b). A measuring test apparatus(44b) tests whether a process is normally performed regarding the wafer during an unloading process. A control unit controls driving respective constitution elements through a measurement signal applied from the measuring test apparatus.