QUARTZ GLASS PRECURSOR AND METHOD OF MANUFACTURING FOR THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a novel quartz glass precursor which uses using fumed silica as raw material and enables manufacture of the quartz glass having high purity and decreased internal bubbles in a low cost and a method of manufacturing for the same. SOLUTION: The quartz glass precursor which is a porous body consisting of the fumed silica formed by preparing a silica slurry of >=2.8 in (n) value containing the fumed silica and polar solvent, then drying this silica slurry and which is in a range of 0.1 to 1 cc/g in the total pore volume measured by a mercury porosimeter and is <=10% of the total pore volume in the integrated volume of the pores having a pore diameter of >=0.1μm is manufactured.