| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for forming a micro lens array structure with a spherical or aspherical surface whose shape can accurately be controlled on a substrate in a simple and convenient manner. SOLUTION: The substrate on the surface of which a polymer material is applied, is placed on a X-Y positioning platform. The light source is controlled to project light through a lens on the lens light beam field of the projection position of the lens made of the polymer material of the substrate. The polymer material in the first position of the substrate is irradiated with light through the lens by controlling the light source to form a micro lens structure by etching the polymer material. The irradiation of the light source is suspended, and the X-Y positioning platform is controlled to move the substrate to a second position. The polymer material in the second position of the substrate is irradiated with light through the lens by controlling the light source to form a micro lens structure by etching the polymer material in the second position. The light source and the X-Y positioning platform are controlled to perform a stepping exposure. Thus, the micro lens array structure is formed by controlling the position and the density of the polymer material of the micro lens structure.
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