| 摘要 |
The object of present invention is to provide a sensitivity calibrating method for a detector of a comparator, which enables easy and highly accurate sensitivity calibration for a first and a second detector for measuring opposing position of an object. Heights of two pairs of reference gauge blocks, a first reference gauge block W1 and a second reference gauge block W2, and the second reference gauge block W2 and a third reference gauge block W3 is first measured, and thereafter, sensitivity coefficients for calibrating the sensitivity of an upper detector 10 and a lower detector 20 are calculated by applying the measured value to a predetermined formula. The calculation is repeated three times, and each value is renewed for the upper and the lower detector 10 and 20 respectively. <IMAGE> |
