EXHAUST LINE OF EQUIPMENT FOR FABRICATING SEMICONDUCTOR

摘要

PURPOSE: An exhaust line of equipment for fabricating a semiconductor is provided to prevent an exhaust material from being attached to the inner wall of the exhaust line, by forming an exhaust line part composed of the first and second lines and by injecting inert gas into the exhaust line part. CONSTITUTION: The first line(36) is connected to a chamber(32) of the equipment(30) for fabricating the semiconductor. The second line(38) has a structure in which the outside is connected to the inside. The exhaust line part(40) is composed of the first and second lines. A switching valve(42) switches on/off the semiconductor fabricating equipment and the exhaust line part, connected to the exhaust line part. A pump(46) pumps the exhaust material, connected to the exhaust line part. A gas supply unit(44) supplies inert gas to the inside of the first line so that the inert gas is supplied to the exhaust line part.