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发明名称
LAMINATED MULTILAYER THICK-FILM ACTUATOR
摘要
申请公布号
SG88736(A1)
申请公布日期
2002.05.21
申请号
SG19970003488
申请日期
1997.11.07
申请人
DATA STORAGE INSTITUTE;NANYANG TECHNOLOGICAL UNIVERSITY;XIAN JIAOTONG UNIVERSITY;SHANGHAI INSTITUTE OF CERAMICS
发明人
ZHU WEI GUANG;YAO KUI;CHANG KUAN TECK;YAO XI;YIN QING RUI
分类号
C04B35/64;H01L41/24;(IPC1-7):H01L41/24
主分类号
C04B35/64
代理机构
代理人
主权项
地址
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