| 摘要 |
PURPOSE: To solve the problem that, when tip contact terminals, beam parts and posts are formed in respective processes so as to be transferred mutually and integrated, a defect is easy to generate in their transferred parts so as to influence a yield, and that there exist many restriction conditions under which the melting point of a brazing material used for the transferred parts must be changed properly because they are transferred in a plurality of parts. CONSTITUTION: The contactor 10 is provided with a contactor board 11, a plurality of continuity parts 12 formed on the board, a plurality of beams 13 which come into contact with the cintinuity parts 12, and a plurality of bumps 14 which are formed at tip parts of the beams 13. The contactor brings the respective bumps 14 into contact with a wafer W so as to inspect its electric characteristic. The beams 13 are separated stepwise from the contactor board 11 so as to be extended and installed along the contactor board 11. The bumps 14 and the beams 13 are formed integrally.
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