| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide such an electrostatic chuck that an insulation layer and electrodes have a small difference in thermal expansion, there is no separation between the insulation layer and the electrodes, the electrodes are never short- circuited and the insulation layer is never led to dielectric breakdown, and the insulation layer has only a few pores. SOLUTION: In the electrostatic chuck wherein the surfaces of the electrodes are coated with the insulation layer, the electrodes are formed of a metal- ceramics composite material which is aluminum or aluminum alloy compounded with silicon carbide powder, the insulation layer is constituted of a ceramic plate, with the ceramic plate being brazed and bonded on the surfaces of the electrodes and coated.</p> |
