LIQUID-WEIGHING APPARATUS AND SUBSTRATE-PROCESSING APPARATUS

摘要

PROBLEM TO BE SOLVED: To accurately weigh trace amounts of liquids such as chemicals. SOLUTION: This liquid-weighing apparatus includes a first supply port 211a through, which chemicals are supplied to a weighing tube 210 holding the chemicals; a second supply port 211b, through which nitrogen gas is supplied to the weighing tube 210; a first discharge port 212a, through which the chemicals are discharged from the tube 210; a second discharge port 212b, through which the chemicals are discharged from the tube 210; a volume- changing cylinder 39 for changing the volume of the tube 210; a first regulating valve 31 for regulating the start and stop of supply of the chemicals from the first supply port 211a; a second regulating valve 33 for regulating the start and stop of supply of the nitrogen gas from the second supply port 211b; a third regulation valve 35 for regulating the start and stop of discharge of the chemicals from the first discharge port 212a; and a fourth regulation valve 37 for regulating the start and stop of discharge of the chemicals from the second discharge port 212b.