| 摘要 |
PROBLEM TO BE SOLVED: To provide a magnetic bearing device capable of enhancing an abrasion-resistance strength and a seizure-resistance of a raceway surface of a touch-down bearing and a circumference surface at a touch-down side and rotatably supporting a rotor at the time of disconnection of a power source of the magnetic bearing for a long period of time. SOLUTION: In the magnetic bearing device 1, a rotor 3 is supported by magnetic bearings 6, 7, 8 in the floating state and is rotatably supported by rolling bearings 12, 13, 14 for touch-down at the time of disconnection of a power source of the magnetic bearing. The rolling bearing for touch-down is made to all ball type bearing in which all rolling elements 17 comprise ceramics. A solid lubrication coating film layer A is formed on a circumference surface 152 at a touch-down side of a rotation ring 15 of the rolling bearing for touch-down.
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