SEMICONDUCTOR PHASE SHIFTER

摘要

PROBLEM TO BE SOLVED: To obtain a semiconductor phase shifter of a small size and setting phase accuracy having less frequency dependence. SOLUTION: The semiconductor phase shifter is configured such that a 3rd coplanar line pattern and a twisted 4th coplanar line pattern are provided between a 1st input output coplanar line pattern and a 2nd input output coplanar line pattern on a semiconductor substrate, and a propagation path of a microwave signal received from the 1st input output coplanar line pattern and outputted from the 2nd input output coplanar line pattern is switched from the 3rd coplanar line pattern into the twisted 4th coplanar line pattern by 1st-4th FETs.