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发明名称
Vorrichtung zur Prüfung einer plasmapolymerisierten Polymerschicht unter Verwendung eines UV-Spektrometers
摘要
申请公布号
DE10191368(T1)
申请公布日期
2002.05.16
申请号
DE20011091368T
申请日期
2001.02.06
申请人
LG ELECTRONICS INC., SEOUL/SOUL
发明人
KANG, SUNG HEE;LEE, HYSUN UK
分类号
H01J37/00;G01N21/00;G01N21/33;H01J37/32;H05H1/24;(IPC1-7):H01J37/00
主分类号
H01J37/00
代理机构
代理人
主权项
地址
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