发明名称 MEMS-BASED SPATIAL-LIGHT MODULATOR WITH INTEGRATED ELECTRONICS
摘要 <p>Method and apparatus for forming an array (12) of reflective elements (18) for spatial light modulation. The array includes a substrate (24) supporting electronically addressable actuators (20), each associated with a corresponding reflective element, a coupling attaching each actuator to the corresponding reflective element to place each reflective element in a substantially planar surface. Each electronically addressable actuator responds to predetermined addressing from a processing circuit (26) to reposition the corresponding reflective element out of the planar surface a predetermined distance identified in the predetermined electronic addressing.</p>
申请公布号 WO2002039171(A1) 申请公布日期 2002.05.16
申请号 US2000041917 申请日期 2000.11.06
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