| 摘要 |
<p>A moiré interferometer (10) has an illumination system (14) and an imaging system (24) that share a common focusing optic (36), which preferably takes the form of a concave mirror. Within the illumination system (14), the common focusing optic (36) collimates light en route to a test surface (12). Within the imaging system (24), the common focusing optic (36) telecentrically images a grating pattern appearing on the test surface (12) onto a fringe pattern detector (26).</p> |
