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发明名称
Selektives ätzen von Silikat
摘要
申请公布号
DE69801261(T2)
申请公布日期
2002.05.16
申请号
DE19986001261T
申请日期
1998.04.14
申请人
INTERNATIONAL BUSINESS MACHINES CORP., ARMONK
发明人
RATH, DAVID L.;JAGANNATHAN, RANGARAJAN;MCCULLOUGH, KENNETH J.;OKORN-SCHMIDT, HARALD F.;MADDEN, KAREN P.;POPE, KEITH R.
分类号
C03C15/00;C09K13/08;H01L21/308;H01L21/311;(IPC1-7):C03C15/00
主分类号
C03C15/00
代理机构
代理人
主权项
地址
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