FLANGE OF VERTICAL CHEMICAL VAPOR DEPOSITION APPARATUS

摘要

PURPOSE: A flange of a vertical chemical vapor deposition apparatus is provided to easily fix an outer tube in a die of the flange by making roughness fix an O-ring to prevent fluctuation of the O-ring. CONSTITUTION: A body(20a) is of a cylindrical type. The outer tube is placed and fixed in the die installed in the upper portion of the outer circumferential surface of the body. The O-ring(26) seals a gap between the outer tube and the die, installed on the die. A Teflon ring(27) is installed on the die adjacent to the O-ring. A ring-type roughness(30) is formed on the die to prevent the fluctuation of the O-ring placed on the die.