| 摘要 |
PURPOSE: An apparatus of separating a quartz tube of a reaction furnace for fabricating a semiconductor is provided to perform a separating work of the quartz tube by improving a structure of a separating device. CONSTITUTION: A reaction furnace is formed with a heating furnace, a quartz tube, a quartz tube fixing body(23), a quartz tube protection ring(24), a rubber ring(25), and an elevator system(26). The quartz tube is transferred to a lower part of the heating furnace when the quartz tube is exchanged. The quartz tube is separated from the quartz tube fixing body(23) by using a disjointing portion(30). The disjointing portion(30) is inserted between the quartz tube fixing body(23) and the quartz tube protection ring(24). The disjointing portion(30) has a push end part(31) and a plurality of lifting end part(33). A plurality of incline plane(31a,33a) is formed on the push end part(31) and the lifting end part(33), respectively.
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