| 摘要 |
PROBLEM TO BE SOLVED: To provide a structure of a gas circulation fan for an excimer laser device which requires no metallic pipes and never allows a magnetic bearing, position sensor or the like to be exposed directly to a fluorine gas atmosphere. SOLUTION: A laser gas is sealed inside a chamber 1, and a fan 3 installed on a rotary shaft 2 is rotated in the chamber 1. On both sides of the chamber 1, the radial magnetic bearings 5 and 9 wound with a metal-coated wire (53) anticorrosive to the laser gas, and the position detecting sensors 6 and 10 are provided. The rotary shaft 2 is magnetically levitated and the fan 3 is rotated by a driving force of a motor stator 11. |
