发明名称 METHOD FOR MAKING A STACKED STRUCTURE COMPRISING A THIN FILM ADHERING TO A TARGET SUBSTRATE
摘要 <p>The invention concerns a method for making a stacked structure comprising at least a thin film adhering to a target substrate, comprising the following steps: a) forming a thin film from an initial substrate, the thin film having a free surface called first contact surface; b) placing in adhering contact the first contact surface with an intermediate support surface, the resulting structure being compatible with subsequent thinning of the initial substrate; c) thinning said substrate to expose a free surface of the thin film called second contact surface and facing the first contact surface; d) placing in adhering contact a surface of the target substrate with at least part of the second contact surface, the resulting structure being compatible with a subsequent removal of all or part of the intermediate support; e) removing at least part of the intermediate support to obtain said stacked structure.</p>
申请公布号 WO2002037556(A1) 申请公布日期 2002.05.10
申请号 FR2001003401 申请日期 2001.11.05
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