NON-VOLATILE MEMORY WITH SOURCE SIDE BORON IMPLANTATION,申请号WO2001US24677-传众专利搜索

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发明名称	NON-VOLATILE MEMORY WITH SOURCE SIDE BORON IMPLANTATION
摘要	One aspect of the present invention relates to a method of making a flash memory cell (32) involving the steps of providing a substrate (30) having a flash memory cell (32) thereon; forming a self-aligned source mask (48) over the substrate (30), the self aligned source mask (48) having openings (50) corresponding to source lines; implanting a source dopant of a first type (52) in the substrate (30) through the openings (50) in the self-aligned source mask (48) corresponding to source lines; removing the self-aligned source mask (48) from the substrate (30); cleaning the substrate (30); and implanting a medium dosage drain implant of a second type to form a source region (54) and a drain region (56) in the substrate (30) adjacent the flash memory cell (32).
申请公布号	WO0237550(A1)	申请公布日期	2002.05.10
申请号	WO2001US24677	申请日期	2001.08.06
申请人	ADVANCED MICRO DEVICES, INC.	发明人	HE, YUE-SONG;HADDAD, SAMEER;THURGATE, TIMOTHY;CHANG, CHI
分类号	H01L21/8247;H01L21/336;H01L27/115;H01L29/788;H01L29/792	主分类号	H01L21/8247
代理机构		代理人
主权项
地址

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