APPARATUS AND METHOD FOR POSITIONING WAFER LOAD PORT

摘要

PROBLEM TO BE SOLVED: To allow quickly and simply positioning and lifting a load port, and easily mounting the load port to a work bench in a manufacturing process and processing. SOLUTION: The apparatus and the method for positioning the wafer load port comprise: a lifting apparatus 50 provided at the bottom if the load port 20 and serving to control height of the load port 20; a coupling base 41 provided at the top of a positioning frame 30; a positioning component 43 protruding upward; a supporting base 42 providing a locking space 44 mutually locking the positioning component 43 at its bottom; a vertical adjusting apparatus and a horizontal adjusting apparatus used for adjusting a relative position between the load port 20 and the work bench in the manufacturing process; and a tilt adjusting apparatus used for adjusting a tilt angle of an space between the load port 20 and the work bench in the manufacturing process.