PROBE CARD AND ANISOTROPIC CONDUCTIVE SHEET MANUFACTURING METHOD USED FOR THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a probe card that can deal with fine patterning of a semiconductor integrated circuit and an anisotropic conductive film manufacturing method used for the same. SOLUTION: This probe card comprises a plurality of probe pins 11 bringing into contact with electrode pads 23a of an object under test, a circuit board 15 in which signal line patterns connected with each probe pin 11 are formed, a space spreader 16 which is installed under the circuit board 15 and on which each electrode pad 16a is arranged being opposed to each probe pin 11 on the opposite surface to the circuit board 15 and each electrode pad 16a is electrically connected to the circuit board 15, and the anisotropic conductive film 17 in which a conductive extrafine wire band 17a' is allocated, and which is arranged between the plurality of probe pins 11 and the space spreader 16 so as to electrically connect each probe pin 11 with each electrode pad 16a of the space spreader.