| 发明名称 |
METHOD AND APPARATUS FOR HOLDING SEMICONDUCTOR ELEMENT |
| 摘要 |
<p>PROBLEM TO BE SOLVED: To prevent dust from sticking when a semiconductor element is sucked to be placed. SOLUTION: When placing an IC chip 12 by sucking and holding the chip by a suction nozzle 1, an air blowing nozzle 9 blows air toward the from of an opening of the suction nozzle 1.</p> |
| 申请公布号 |
JP2002134589(A) |
申请公布日期 |
2002.05.10 |
| 申请号 |
JP20000322042 |
申请日期 |
2000.10.23 |
| 申请人 |
MATSUSHITA ELECTRIC IND CO LTD |
发明人 |
INUZUKA RYOJI;SHIDA SATOSHI;YOSHIDA HIROYUKI |
| 分类号 |
H01L21/677;H01L21/68;(IPC1-7):H01L21/68 |
主分类号 |
H01L21/677 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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