PRODUCTION METHOD OF TRANSPARENT CONDUCTIVE FILM

摘要

PROBLEM TO BE SOLVED: To provide a production method of transparent conductive film wherein change of adhesion prevention panels may help increase adherence of vaporized ITO particles on adhesion prevention immediately after the change and also holds back generation of rejects caused by ITO defects due to inclusion of foreign substances, thereby enhancing the production efficiency of transparent conductive film. SOLUTION: This is a transparent ITO film manufacturing method in which transparent conductive ITO film is formed upon a glass substrate 1 in a vacuum container 8 where adhesion prevention panels 38 are located in place as part of container inner walls to prevent adhesion of vaporized ITO particles upon the container inner walls, and the film formed upon adhesion prevention panels 38 in advance is of the same type of ITO as formed on glass substrate 1.