METHOD FOR REMOVING PELLICLE AND APPARATUS FOR IT

摘要

PROBLEM TO BE SOLVED: To provide a removing method and an apparatus for removing pellicle which is stuck on a mask easily and reliably. SOLUTION: An apparatus A which removes a pellicle 1 stuck on a mask 5 by a adhesive 4 from the mask 5 comprises a holding jig 7 to hold the mask 5, a pin type jig 8 which can be insert into a hole 6 for the jig in a pellicle frame 2, a lever 9 which insert the jig 8 into the hole by moving it forward or backward and a lever 10 which pulls up the jig 8.